JPH0533338B2 - - Google Patents

Info

Publication number
JPH0533338B2
JPH0533338B2 JP13551784A JP13551784A JPH0533338B2 JP H0533338 B2 JPH0533338 B2 JP H0533338B2 JP 13551784 A JP13551784 A JP 13551784A JP 13551784 A JP13551784 A JP 13551784A JP H0533338 B2 JPH0533338 B2 JP H0533338B2
Authority
JP
Japan
Prior art keywords
receiving plate
pressure
pressure receiving
base
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP13551784A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6114532A (ja
Inventor
Hidefumi Saito
Yoshio Ashida
Osamu Tawara
Hiroyoshi Mizuguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP13551784A priority Critical patent/JPS6114532A/ja
Publication of JPS6114532A publication Critical patent/JPS6114532A/ja
Publication of JPH0533338B2 publication Critical patent/JPH0533338B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP13551784A 1984-06-30 1984-06-30 圧力センサの製造方法 Granted JPS6114532A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13551784A JPS6114532A (ja) 1984-06-30 1984-06-30 圧力センサの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13551784A JPS6114532A (ja) 1984-06-30 1984-06-30 圧力センサの製造方法

Publications (2)

Publication Number Publication Date
JPS6114532A JPS6114532A (ja) 1986-01-22
JPH0533338B2 true JPH0533338B2 (en]) 1993-05-19

Family

ID=15153612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13551784A Granted JPS6114532A (ja) 1984-06-30 1984-06-30 圧力センサの製造方法

Country Status (1)

Country Link
JP (1) JPS6114532A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5260155B2 (ja) * 2008-06-16 2013-08-14 株式会社堀場エステック 静電容量型圧力センサ及びその製造方法
CN113432763B (zh) * 2021-06-17 2023-07-21 中北大学 夹芯式pvdf压力计真空环境压制装置及方法

Also Published As

Publication number Publication date
JPS6114532A (ja) 1986-01-22

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